Layer-by-layer growth and growth-mode transition of SrRuO3 thin films on atomically flat single-terminated SrTiO3 (111) surfaces

摘要

We report on growth-mode transitions in the growth of SrRuO3 thin films onatomically flat Ti4+ single-terminated SrTiO3 (111) substrates, investigated byreflection high-energy electron diffraction and atomic force microscopy. Overthe first ~9 unit cells, the dominant growth mode changes from island tolayer-by-layer for the growth rate of 0.074 unit cells/sec and the growthtemperature of 700 C. Moreover, in the course of growing SrRuO3 films, thegoverning growth mode of interest can be manipulated by changing the growthtemperature and the growth rate, which change allows for the selection of thedesired layer-by-layer mode. The present study thus paves the way forintegrations of SrRuO3 thin layers into (111)-orientated oxideheterostructures, and hence multi-functional devices, requiring control of thesharp atomic-level interfaces and the layer-by-layer growth mode.